SPIE Proceedings [SPIE High-Power Lasers and Applications -...

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SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - 3D microstructuring inside photosensitive glass by use of a femtosecond laser for lab-on-chip applications

Cheng, Ya, Sugioka, Koji, Masuda, Masashi, Midorikawa, Katsumi, Kawachi, Masako, Shihoyama, Kazuhiko, Toyoda, Koichi, Pique, Alberto, Sugioka, Koji, Herman, Peter R., Fieret, Jim, Bachmann, Friedrich
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Volume:
4977
Year:
2003
Language:
english
DOI:
10.1117/12.479539
File:
PDF, 409 KB
english, 2003
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