![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Systems Design - St. Etienne, France (Tuesday 30 September 2003)] Optical Fabrication, Testing, and Metrology - New tools for high-precision positioning of optical elements in high-NA microscope objectives
Heil, Joachim, Geyl, Roland, Rimmer, David, Bauer, Tobias, Mueller, Willi, Wang, Lingli, Sure, Thomas, Wesner, JoachimVolume:
5252
Year:
2003
Language:
english
DOI:
10.1117/12.512835
File:
PDF, 1.42 MB
english, 2003