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SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Nanoengineering: Fabrication, Properties, Optics, and Devices II - Si-based UV transparent subwavelength optical elements
Lee, Chien Chieh, Dobisz, Elizabeth A., Eldada, Louay A., Hsu, Che-Lung, Wang, Chih Ming, Chen, Jing Yi, Chang, Jenq Yang, Chi, Gou ChungVolume:
5931
Year:
2005
Language:
english
DOI:
10.1117/12.616319
File:
PDF, 444 KB
english, 2005