SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Dynamic testing of micro devices using PZT base excitation
Hu, Min, Xie, Jin, Ling, Shih-Fu, Du, Hejun, Fu, Yongqing, Lopez, Jose F., Quan, Chenggen, Chau, Fook Siong, Fernandez, Francisco V., Lopez-Villegas, Jose Maria, Asundi, Anand, Wong, Brian Stephen, deYear:
2012
Language:
english
DOI:
10.1117/12.621754
File:
PDF, 598 KB
english, 2012