SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror
Evans, Julia W., Olivier, Scot S., Tadigadapa, Srinivas A., Morzinski, Katie, Severson, Scott, Henning, Albert K., Poyneer, Lisa, Macintosh, Bruce, Dillon, Daren, Reza, Layra, Gavel, Donald, Palmer, DVolume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.648977
File:
PDF, 656 KB
english, 2006