SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and...

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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

Evans, Julia W., Olivier, Scot S., Tadigadapa, Srinivas A., Morzinski, Katie, Severson, Scott, Henning, Albert K., Poyneer, Lisa, Macintosh, Bruce, Dillon, Daren, Reza, Layra, Gavel, Donald, Palmer, D
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Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.648977
File:
PDF, 656 KB
english, 2006
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