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SPIE Proceedings [SPIE 26th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 18 September 2006)] Photomask Technology 2006 - Adding grayscale layer to chrome photomasks
Poon, David K., Martin, Patrick M., Naber, Robert J., Dykes, James M., Choo, Chinheng, Tsui, Jimmy T. K., Wang, Jun, Chapman, Glenn H., Tu, Yuqiang, Reynolds, Patrick, Zanzal, AndrewVolume:
6349
Year:
2006
Language:
english
DOI:
10.1117/12.686599
File:
PDF, 796 KB
english, 2006