SPIE Proceedings [SPIE Third International Symposium on Precision Mechanical Measurements - Urumqi, China (Wednesday 2 August 2006)] Third International Symposium on Precision Mechanical Measurements - White-light interferometric techniques in microstructure measurement
Lin, Kao-Hui, Hu, Ya-HuiVolume:
6280
Year:
2006
Language:
english
DOI:
10.1117/12.716115
File:
PDF, 692 KB
english, 2006