SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Calculating subtool pressures by using genetic algorithms
Cordero-Dávila, Alberto, Yang, Li, Chen, Yaolong, Téllez-Arriaga, Leonardo, González-Garcia, Jorge, Kley, Ernst-Bernhard, Li, Rongbin, Robledo-Sánchez, Carlos Ignacio, Cuautle-Cortéz, Jorge, Díaz-AnzuVolume:
6722
Year:
2007
Language:
english
DOI:
10.1117/12.782664
File:
PDF, 388 KB
english, 2007