SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Hardness of CNx films deposited by MCECR plasma sputtering
Cai, Changlong, Yang, Li, Chen, Yaolong, Li, Junpeng, Mi, Qian, Kley, Ernst-Bernhard, Li, Rongbin, Ma, Weihong, Yan, Yixin, Liang, HaifengVolume:
6722
Year:
2007
Language:
english
DOI:
10.1117/12.783668
File:
PDF, 237 KB
english, 2007