SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - The impact of illuminator signatures on optical proximity effects
Tyminski, Jacek K., Chen, Alek C., Lin, Burn, Renwick, Stephen P., Yen, AnthonyVolume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804488
File:
PDF, 194 KB
english, 2008