SPIE Proceedings [SPIE Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies - Constanta, Romania (Thursday 26 August 2010)] Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V - Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry
Comanescu, Constantin Florin, Schiopu, Paul, Caruntu, George, Tibeica, Catalin, Purica, Munizer, Schiopu, PaulVolume:
7821
Year:
2010
Language:
english
DOI:
10.1117/12.882061
File:
PDF, 290 KB
english, 2010