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SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Rapid Isothermal Processing - Effect Of Silicon Emissivity On Temperature Measurement And Control In Rapid Thermal Processing

Crowley, John L., Liao, Jimmy C., Gelpey, Jeffrey C., Singh, Rajendra
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Volume:
1189
Year:
1990
Language:
english
DOI:
10.1117/12.963959
File:
PDF, 430 KB
english, 1990
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