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Multilayer deformation planarization by substrate pit suturing
Chai, Yingjie, Zhu, Meiping, Xing, Huanbin, Wang, Hu, Cui, Yun, Shao, JiandaVolume:
41
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.41.003403
Date:
August, 2016
File:
PDF, 1.80 MB
english, 2016