Characterization of boron nitride films deposited from BCl3-NH3-H2mixtures in chemical vapour infiltration conditions
V. Cholet, L. Vandenbulcke, J. P. Rouan, P. Baillif, R. ErreVolume:
29
Language:
english
Pages:
19
DOI:
10.1007/bf00368905
Date:
March, 1994
File:
PDF, 1.60 MB
english, 1994