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Deposition of silicon oxide coatings by atmospheric pressure plasma jet for oxygen diffusion barrier applications
Zhang, Haitao, Guo, Zheng, Chen, Qiang, Wang, Xinwei, Wang, Zhengduo, Liu, ZhongweiVolume:
615
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.06.042
Date:
September, 2016
File:
PDF, 1.76 MB
english, 2016