Critical angles in DC magnetron glad thin films
Siad, Ahcene, Besnard, Aurélien, Nouveau, Corinne, Jacquet, PhilippeVolume:
131
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.07.012
Date:
September, 2016
File:
PDF, 839 KB
english, 2016