Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser
Rossall, Andrew K., Aslanyan, Valentin, Tallents, Greg J., Kuznetsov, Ilya, Rocca, Jorge J., Menoni, Carmen S.Volume:
3
Language:
english
Journal:
Physical Review Applied
DOI:
10.1103/PhysRevApplied.3.064013
Date:
June, 2015
File:
PDF, 1.27 MB
english, 2015