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SPIE Proceedings [SPIE International Conference on Microelectronics - Warsaw, Poland (Monday 21 September 1992)] International Conference of Microelectronics: Microelectronics '92 - Influence of implanted ion charge on electrophysical parameters of formed structures
Fattakhov, Yakh'ya V., Sowinski, Andrzej, Grzybowski, Jan, Karas, Evelina Y., Khaibullin, Il'dus B., Kucharski, Witold T., Romaniuk, Ryszard S., Kurbatova, Nadegda V., Shtyrkov, Evgeny I.Volume:
1783
Year:
1992
Language:
english
DOI:
10.1117/12.131053
File:
PDF, 549 KB
english, 1992