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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Modeling of high-density plasma sources
Graves, David B., Wu, Han-Ming, Porteous, Robert K., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.Volume:
1803
Year:
1993
Language:
english
DOI:
10.1117/12.142910
File:
PDF, 617 KB
english, 1993