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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Closed-loop temperature control system for a low-temperature etch chuck
Wright, D. R., Clark, Wayne D., Hartman, Dennis C., Sridharan, U. C., Kent, Martin, Kerns, Ralph C., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.Volume:
1803
Year:
1993
Language:
english
DOI:
10.1117/12.142927
File:
PDF, 338 KB
english, 1993