SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Annealing effects on heavily C-doped GaAs and InGaAs films
Han, Weiyu, Calderon, L., Lu, Yu C., Lee, H. S., Schauer, S. N., Moerkirk, Robert P., Jones, Kenneth A., Yang, Li-Wu, Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.Volume:
1803
Year:
1993
Language:
english
DOI:
10.1117/12.142933
File:
PDF, 604 KB
english, 1993