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SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Stray Radiation in Optical Systems III - Optical reflectance characterization of silicon micromachined surfaces
Sowders, David M., Bright, Victor M., Kolesar, Jr., Edward S., Breault, Robert P.Volume:
2260
Year:
1994
Language:
english
DOI:
10.1117/12.189216
File:
PDF, 750 KB
english, 1994