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SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Multilayer coatings for x-ray optics made by distributed electron cyclotron resonance (DECR) plasma sputtering
Hoghoj, Peter, Abeles, Florin, Ziegler, Eric, Lueken, Eike, Peffen, Jean-Christophe, Freund, Andreas K.Volume:
2253
Year:
1994
Language:
english
DOI:
10.1117/12.192080
File:
PDF, 351 KB
english, 1994