SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 15 April 2013)] Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III - Characterisation of EUV damage thresholds and imaging performance of Mo/Si multilayer mirrors

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