SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Shortening of the process chain by tactile inline measurement

Doering, Lutz, Thronicke, Nicole, Löbner, Christian, Frank, Thomas, Reich, Steffen, Völlmeke, Stefan, Steinke, Arndt, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika
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Volume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2017853
File:
PDF, 441 KB
english, 2013
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