SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA, United States (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Utilization of surface electromagnetic wave excitation for increase of submicron diffraction grating depth on n-InP fabricated by holographic wet etching
Panchenko, Vladislav Y., Dubowski, Jan J., Seminogov, Vladimir N., Khudobenko, Alexander I.Volume:
2403
Year:
1995
Language:
english
DOI:
10.1117/12.206283
File:
PDF, 1.15 MB
english, 1995