SPIE Proceedings [SPIE Laser-Induced Damage in Optical Materials: 1994 - Boulder, CO (Monday 24 October 1994)] Laser-Induced Damage in Optical Materials: 1994 - Development of plasma-enhanced CVD for multilayer mirror coatings (Abstract Only)
Freidhoff, Carl B., Buhay, Harry, Partlow, William D., Decker, Donald L., Klemm, Karl A., Bennett, Harold E., Guenther, Arthur H., Kozlowski, Mark R., Newnam, Brian E., Soileau, M. J.Volume:
2428
Year:
1995
Language:
english
DOI:
10.1117/12.213717
File:
PDF, 57 KB
english, 1995