SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications - Micromachined three-dimensional tunable Fabry-Perot etalons
Lin, Lih-Yuan, Bailey, Wayne, Motamedi, M. Edward, Shen, J. L., Lee, Shi-sheng, Luo, Fang-Chen, Wu, Ming C.Volume:
2641
Year:
1995
Language:
english
DOI:
10.1117/12.220937
File:
PDF, 446 KB
english, 1995