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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] MOEMS and Miniaturized Systems XV - Study on sputtered a-Si:H for micro optical diffusion sensor using laser-induced dielectrophoresis
Piyawattanametha, Wibool, Park, Yong-Hwa, Kamata, Makoto, Yamada, Kan, Taguchi, Yoshihiro, Nagasaka, YujiVolume:
9760
Year:
2016
Language:
english
DOI:
10.1117/12.2216748
File:
PDF, 711 KB
english, 2016