SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Characterization of microwave plasma CVD of diamond by mass analysis and optical emission spectroscopy
Weimer, Wayne A., Johnson, Curtis E., Feldman, Albert, Holly, SandorYear:
2012
Language:
english
DOI:
10.1117/12.22447
File:
PDF, 247 KB
english, 2012