![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 15th Annual BACUS Symposium on Photomask Technology and Management '95 - Santa Clara, CA (Wednesday 20 September 1995)] 15th Annual BACUS Symposium on Photomask Technology and Management - Improved estimates of the range of errors on photomasks using measured values of skewness and kurtosis
Hamaker, Henry Chris, Shelden, Gilbert V., Wiley, James N.Volume:
2621
Year:
1995
Language:
english
DOI:
10.1117/12.228171
File:
PDF, 269 KB
english, 1995