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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Planar surface-micromachined pressure sensor with a subsurface, embedded reference pressure cavity
Eaton, William P., Smith, James H., Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
DOI:
10.1117/12.250711
File:
PDF, 1.44 MB
1996