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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Productivity improvement through industrial engineering in the semiconductor industry
Meyersdorf, Doron, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
2874
Year:
1996
Language:
english
DOI:
10.1117/12.250849
File:
PDF, 605 KB
english, 1996