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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Bipolar compatible epitaxial poly for surface-micromachined smart sensors
Gennissen, Paul T. J., French, Patrick J., Bartek, Marian, Sarro, Pasqualina M., van der Boogaard, A., Visser, Cassan C. C., Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251240
File:
PDF, 877 KB
english, 1996