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SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Ferroelectric SrBi2Ta2O9 thin films made by one- and two-step metalorganic chemical vapor deposition
Li, Tingkai, Stall, Richard A., Zhu, Yongfei, Desu, Seshu B., Peng, Chien-Hsiung, Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271436
File:
PDF, 763 KB
english, 1997