SPIE Proceedings [SPIE Polarimetry and Ellipsometry - Kazimierz Dolny, Poland (Monday 20 May 1996)] Polarimetry and Ellipsometry - Determination of the optical model of the MOS structure with spectroscopic ellipsometry
Kudla, Andrzej, Brzezinska, Danuta, Wagner, Thomas, Sawicki, Zbigniew, Pluta, Maksymilian, Wolinski, Tomasz R.Volume:
3094
Year:
1997
Language:
english
DOI:
10.1117/12.271833
File:
PDF, 423 KB
english, 1997