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SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA, USA (Monday 10 March 1997)] Metrology, Inspection, and Process Control for Microlithography XI - Stability of glass probe tips for critical dimension measurement
Griffith, Joseph E., Miller, Gabriel L., Hopkins, Leslie C., Bryson III, Charles E., Snyder, E. J., Plombon, J. J., Vasilyev, Leonid A., Bindell, Jeffery B.Volume:
3050
Year:
1997
Language:
english
DOI:
10.1117/12.275932
File:
PDF, 938 KB
english, 1997