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SPIE Proceedings [SPIE Lasers and Optics in Manufacturing III - Munich, Germany (Monday 16 June 1997)] Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications - Large-field high-resolution photolithography
Clube, Francis S. M., Gray, Simon, Struchen, Denis, Malfoy, Stephane, Darbellay, Yves, Magnon, Nicolas, Le Gratiet, Bertrand, Tisserand, Jean-Claude, Parriaux, Olivier M., Kley, Ernst-Bernhard, CulshaVolume:
3099
Year:
1997
Language:
english
DOI:
10.1117/12.281232
File:
PDF, 690 KB
english, 1997