SPIE Proceedings [SPIE Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-Based Spectroscopy in XUV, UV, IR - Russia (Thursday 1 January 1998)] Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves - Spectroscopic characterization of plane multilayer diffraction gratings using a laser-produced plasma XUV radiation source