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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II - In-line inspection optimization using a yield management system
Mizuno, Fumio, Isogai, Seiji, Ajuria, Sergio A., Hossain, Tim Z.Volume:
3509
Year:
1998
Language:
english
DOI:
10.1117/12.324406
File:
PDF, 705 KB
english, 1998