SPIE Proceedings [SPIE 15th European Conference on Mask Technology for Integrated Circuits and Micro-Components - Munich, Germany (Monday 16 November 1998)] 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 - Mask technology for EUV lithography
Bujak, M., Burkhart, Scott C., Cerjan, Charles J., Kearney, Patrick A., Moore, Craig E., Prisbrey, Shon T., Sweeney, Donald W., Tong, William M., Vernon, Stephen P., Walton, Christopher C., Warrick, AVolume:
3665
Year:
1998
Language:
english
DOI:
10.1117/12.346225
File:
PDF, 878 KB
english, 1998