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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Finite element modeling of SCALPEL masks
Engelstad, Roxann L., Vladimirsky, Yuli, Lovell, Edward G., Dicks, Gerald A., Martin, Carl J., Schlax, Michael P., Semke, William H., Liddle, James A., Novembre, Anthony E.Volume:
3676
Year:
1999
Language:
english
DOI:
10.1117/12.351085
File:
PDF, 4.69 MB
english, 1999