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SPIE Proceedings [SPIE Photonics Prague '99 - Prague (Monday 21 June 1999)] Photonics, Devices, and Systems - Amorphous chalcogenide semiconductor resists for holography and electron-beam lithography
Teteris, Janis, Hrabovsky, Miroslav, Tomanek, Pavel, Jaeaeskelaeinen, Timo, Turunen, Jari P., Miler, Miroslav, Jefimov, K.Volume:
4016
Year:
1999
Language:
english
DOI:
10.1117/12.373626
File:
PDF, 776 KB
english, 1999