SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Complex Mediums - Estimation of intrinsic stresses and elastic moduli in thin films
Andia, Pedro C., Costanzo, Francesco, Gray, Gary L., Lakhtakia, Akhlesh, Weiglhofer, Werner S., Messier, Russell F.Volume:
4097
Year:
2000
Language:
english
DOI:
10.1117/12.390587
File:
PDF, 1.58 MB
english, 2000