SPIE Proceedings [SPIE International Symposium on Optical...

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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA, USA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces

Weingaertner, Ingolf, Al-Jumaily, Ghanim A., Duparre, Angela, Schulz, Michael, Thomsen-Schmidt, Peter, Singh, Bhanwar
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Volume:
4099
Year:
2000
Language:
english
DOI:
10.1117/12.405814
File:
PDF, 1.64 MB
english, 2000
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