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SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Nitrogen-doped plasma-enhanced CVD amorphous carbon: processes and properties
Voight, Steven A., Chu, Junhao, Liu, Pulin, Smith, Steven M., Tompkins, Harland G., Chang, Yong, Hooper, Andy, Talin, A.Volume:
4086
Year:
2000
Language:
english
DOI:
10.1117/12.408318
File:
PDF, 613 KB
english, 2000