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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Process Control and Diagnostics - Real-time yield checks at wafer test
Rodriguez, Enrique, Miller, Michael L., Ashtiani, Kaihan A., Cano, Carlos, Sanchez-Vicente, Javier, Moreno, JulianVolume:
4182
Year:
2000
Language:
english
DOI:
10.1117/12.410098
File:
PDF, 137 KB
english, 2000