SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Operation cycle modeling for electrostatic-type microrelay
Efremov, Georgy I., Mukhurov, Nikolay I., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425317
File:
PDF, 331 KB
english, 2001