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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching
Lee, June-Young, Kim, Seong-Hyok, Lim, Hyung-Taek, Kim, Che-Heung, Kim, Yong-Kweon, Karam, Jean Michel, Yasaitis, John A.Volume:
4557
Year:
2001
Language:
english
DOI:
10.1117/12.442952
File:
PDF, 322 KB
english, 2001