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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer
Zhu, Ziqiang, Shi, Yanling, Long, Yongfu, Xin, Peisheng, Lai, Zongsheng, Karam, Jean Michel, Yasaitis, John A.Volume:
4557
Year:
2001
DOI:
10.1117/12.442977
File:
PDF, 106 KB
2001